Gas purification systems, Aeronex® I series

Leverantör: Entegris
ENTEEGPS8IEA 0 SEK
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Gas purification systems, Aeronex® I series
These purifiers are designed for use with N₂ gas. They remove O₂, CO, CO₂, H₂O and non-methane hydrocarbons to sub-ppb levels in inert gases. These are used in Photolithography, MOCVD, ALD and LTE.

  • Complete automatic operation
  • System uses two purifier beds in order to maintain a continuous flow of pure gas
  • Removes contaminants to sub-ppb (part-per-billion) and ppt (part-per-trillion) levels
  • Improves system safety by locating all purifiers in one cabinet, with multiple safety controls
  • Power failure will not damage the purification system
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required

CE and SEMI® S2 certified
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